Canon to Deliver World's First Nanoimprint Replica Mask Manufacturing Equipment for Mass-Production to Leading Mask Supplier

Author
SySAdmin
Posted
February 27, 2017
Views
679

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Page 1
<HTML>
<HEAD>
<META http-equiv="Content-Type" content="text/html; charset=UTF-8">
<meta content="text/html; charset=utf-8" http-equiv="Content-Type">
<style type="text/css">
          .xn-newslines .xn-distributor{
          display:none;
          }
          .xn-newslines .xn-dateline{
          display:none;
          }
         
      /* /\/\/\/\/\/\/\/\/ CLIENT-SPECIFIC STYLES /\/\/\/\/\/\/\/\/ */
        #outlook a{padding: 0;} /* Force Outlook to provide a "view in browser" message */
        .ReadMsgBody{width: 100%;} .ExternalClass{width: 100%;} /* Force Hotmail to display emails at full width */
        .ExternalClass, .ExternalClass p, .ExternalClass span, .ExternalClass font, .ExternalClass td, .ExternalClass div {line-height: 100%;} /* Force Hotmail to display normal line spacing */
        body, table, td, p, a, li, blockquote{-webkit-text-size-adjust: 100%; -ms-text-size-adjust: 100%;} /* Prevent WebKit and Windows mobile changing default text sizes */
        table, td{mso-table-lspace: 0pt; mso-table-rspace: 0pt;} /* Remove spacing between tables in Outlook 2007 and up */
        img{-ms-interpolation-mode: bicubic;} /* Allow smoother rendering of resized image in Internet Explorer */

        /* /\/\/\/\/\/\/\/\/ RESET STYLES /\/\/\/\/\/\/\/\/ */
        body{margin: 0; padding: 0;}
        img{border: 0; height: auto; line-height: 100%; outline: none; text-decoration: none;}
        table{border-collapse: collapse !important;}
        body, #bodyTable, #bodyCell{height: 100% !important; margin: 0; padding: 0; width: 100% !important;}

        /* /\/\/\/\/\/\/\/\/ TEMPLATE STYLES /\/\/\/\/\/\/\/\/ */

        /* ========== Page Styles ========== */

        #bodyCell{padding: 20px;}
        #templateContainer{
            width: 600px;
            background-color: #ffffff;
        }

            /**
            * @tip Set the background color and top border for your email. You may want to choose colors that match your company's branding.
            * @theme page
            */
            body, #bodyTable{
                background-color: #DEE0E2;
            }

            /**
            * @tip Set the background color and top border for your email. You may want to choose colors that match your company's branding.
            * @theme page
            */
            #bodyCell{
                border-top: 4px solid #BBBBBB;
            }

            /**
            * @tip Set the border for your email.
            */
            #templateContainer{
                border: 1px solid #BBBBBB;
            }

            /**
            * @tip Set the styling for all first-level headings in your emails. These should be the largest of your headings.
            * @style heading 1
            */
            h1{
                color: #404040 !important;
                display: block;
                font-family: Helvetica;
                font-size: 26px;
                font-style: normal;
                font-weight: bold;
                line-height: 100%;
                letter-spacing: normal;
                margin-top: 0;
                margin-right: 0;
                margin-bottom: 10px;
                margin-left: 0;
                text-align: left;
            }

            /**
            * @tip Set the styling for all second-level headings in your emails.
            * @style heading 2
            */
            h2{
                color: #404040 !important;
                display: block;
                font-family: Helvetica;
                font-size: 20px;
                font-style: normal;
                font-weight: bold;
                line-height: 100%;
                letter-spacing: normal;
                margin-top: 0;
                margin-right: 0;
                margin-bottom: 10px;
                margin-left: 0;
                text-align: left;
            }

            /**
            * @tip Set the styling for all third-level headings in your emails.
            * @style heading 3
            */
            h3{
                color: #3d98c6 !important;
                display: block;
                font-family: Helvetica;
                font-size: 16px;
                font-weight: normal;
                line-height: 100%;
                letter-spacing: normal;
                margin-top: 0;
                margin-right: 0;
                margin-bottom: 10px;
                margin-left: 0;
                text-align: left;
            }

            /**
            * @tip Set the styling for all fourth-level headings in your emails. These should be the smallest of your headings.
            * @style heading 4
            */
            h4{
                color: #808080 !important;
                display: block;
                font-family: Helvetica;
                font-size: 14px;
                font-weight: normal;
                line-height: 100%;
                letter-spacing: normal;
                margin-top: 0;
                margin-right: 0;
                margin-bottom: 10px;
                margin-left: 0;
                text-align: left;
            }

            h4.subtitle {
              color: #808080 !important;
              font-size: 14px;
            }

            /* ========== Header Styles ========== */

            /**
            * @tip Set the background color and bottom border for your email's preheader area.
            * @theme header
            */
            #templatePreheader{
                background-color: #F4F4F4;
                border-bottom: 1px solid #CCCCCC;
            }

            /**
            * @tip Set the styling for your email's preheader text. Choose a size and color that is easy to read.
            */
            .preheaderContent{
                color: #808080;
                font-family: Helvetica;
                font-size: 10px;
                line-height: 125%;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's preheader links. Choose a color that helps them stand out from your text.
            */
            .preheaderContent a:link, .preheaderContent a:visited, /* Yahoo! Mail Override */ .preheaderContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #606060;
                font-weight: normal;
                text-decoration: underline;
            }

            /**
            * @tip Set the background color and borders for your email's header area.
            * @theme header
            */
            #templateHeader{
                background-color: #F4F4F4;
                border-top: 1px solid #FFFFFF;
                border-bottom: 1px solid #CCCCCC;
            }

            /**
            * @tip Set the styling for your email's header text. Choose a size and color that is easy to read.
            */
            .headerContent{
                color: #505050;
                font-family: Helvetica;
                font-size: 20px;
                font-weight: bold;
                line-height: 100%;
                padding-top: 0;
                padding-right: 0;
                padding-bottom: 0;
                padding-left: 0;
                text-align: left;
                vertical-align: middle;
            }

            /**
            * @tip Set the styling for your email's header links. Choose a color that helps them stand out from your text.
            */
            .headerContent a:link, .headerContent a:visited, /* Yahoo! Mail Override */ .headerContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: normal;
                text-decoration: underline;
            }

            #headerImage{
                height: auto;
                max-width: 600px;
            }

            #socialShare img {
                margin-right: 3px;
            }

            /* ========== Body Styles ========== */

            /**
            * @tip Set the background color and borders for your email's body area.
            */
            #templateBody{
                background-color: #FFFFFF;
                border-top: 1px solid #FFFFFF;
                /*border-bottom: 1px solid #CCCCCC;*/
            }

            /**
            * @tip Set the styling for your email's main content text. Choose a size and color that is easy to read.
            * @theme main
            */
            .bodyContent{
                color: #505050;
                font-family: Helvetica;
                font-size: 16px;
                line-height: 150%;
                padding-top: 20px;
                padding-right: 20px;
                padding-bottom: 20px;
                padding-left: 20px;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's main content links. Choose a color that helps them stand out from your text.
            */
            .bodyContent a:link, .bodyContent a:visited, /* Yahoo! Mail Override */ .bodyContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: normal;
                text-decoration: underline;
            }

            .bodyContent img{
                display: inline;
                height: auto;
                max-width: 560px;
            }

            /**
            * @tip Set the background color and border for your email's data table.
            */
            .templateDataTable{
                background-color: #FFFFFF;
            }

            .templateDataTable a:link {
                text-decoration: none;
                color: #3d98c6;
            }

            /**
            * @tip Set the styling for your email's data table text. Choose a size and color that is easy to read.
            */
            .dataTableHeading{
                /*background-color: #E7F1FC;*/
                color: #336699;
                font-family: Helvetica;
                font-size: 14px;
                font-weight: bold;
                line-height: 150%;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's data table links. Choose a color that helps them stand out from your text.
            */
            .dataTableHeading a:link, .dataTableHeading a:visited, /* Yahoo! Mail Override */ .dataTableHeading a .yshortcuts /* Yahoo! Mail Override */{
                color: #FFFFFF;
                font-weight: bold;
            }

            /**
            * @tip Set the styling for your email's data table text. Choose a size and color that is easy to read.
            */
            .dataTableContent{
                border-top: 1px solid #DDDDDD;
                border-bottom: 0;
                color: #404040;
                font-family: Helvetica;
                font-size: 12px;
                line-height: 150%;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's data table links. Choose a color that helps them stand out from your text.
            */
            .dataTableContent a:link, .dataTableContent a:visited, /* Yahoo! Mail Override */ .dataTableContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: bold;
            }

            /* ========== Column Styles ========== */

            .templateColumnContainer{width: 200px;}

            /**
            * @tip Set the background color and borders for your email's column area.
            */
            #templateColumns{
                background-color: #F4F4F4;
                border-top: 1px solid #FFFFFF;
                border-bottom: 1px solid #CCCCCC;
            }

            /**
            * @tip Set the styling for your email's left column content text. Choose a size and color that is easy to read.
            */
            .leftColumnContent{
                color: #505050;
                font-family: Helvetica;
                font-size: 14px;
                line-height: 150%;
                padding-top: 0;
                padding-right: 20px;
                padding-bottom: 20px;
                padding-left: 20px;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's left column content links. Choose a color that helps them stand out from your text.
            */
            .leftColumnContent a:link, .leftColumnContent a:visited, /* Yahoo! Mail Override */ .leftColumnContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: normal;
                text-decoration: underline;
            }

            /**
            * @tip Set the styling for your email's center column content text. Choose a size and color that is easy to read.
            */
            .centerColumnContent{
                color: #505050;
                font-family: Helvetica;
                font-size: 14px;
                line-height: 150%;
                padding-top: 0;
                padding-right: 20px;
                padding-bottom: 20px;
                padding-left: 20px;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's center column content links. Choose a color that helps them stand out from your text.
            */
            .centerColumnContent a:link, .centerColumnContent a:visited, /* Yahoo! Mail Override */ .centerColumnContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: normal;
                text-decoration: underline;
            }

            /**
            * @tip Set the styling for your email's right column content text. Choose a size and color that is easy to read.
            */
            .rightColumnContent{
                color: #505050;
                font-family: Helvetica;
                font-size: 14px;
                line-height: 150%;
                padding-top: 0;
                padding-right: 20px;
                padding-bottom: 20px;
                padding-left: 20px;
                text-align: left;
            }

            /**
            * @tip Set the styling for your email's right column content links. Choose a color that helps them stand out from your text.
            */
            .rightColumnContent a:link, .rightColumnContent a:visited, /* Yahoo! Mail Override */ .rightColumnContent a .yshortcuts /* Yahoo! Mail Override */{
                color: #3d98c6;
                font-weight: normal;
                text-decoration: underline;
            }

            .leftColumnContent img, .rightColumnContent img{
                display: inline;
                height: auto;
                max-width: 260px;
            }

            /* ========== Footer Styles ========== */

            /**
            * @tip Set the background color and borders for your email's footer area.
            * @theme footer
            */
            #templateFooter{
                background-color: #F4F4F4;
                border-top: 1px solid #FFFFFF;
            }

            /**
            * @tip Set the styling for your email's footer text. Choose a size and color that is easy to read.
            * @theme footer
            */
            .footerContent{
                color: #808080;
                font-family: Helvetica;
                font-size: 10px;
                line-height: 150%;
                padding-top: 20px;
                padding-right: 20px;
                padding-bottom: 20px;
                padding-left: 20px;
                text-align: left;
            }

            .footerContent.social, .footerContent.social h4 {
                text-align: center;
            }

            .footerContent.social a {
                margin: 0 10px;
            }

            /**
            * @tip Set the styling for your email's footer links. Choose a color that helps them stand out from your text.
            */
            .footerContent a:link, .footerContent a:visited, /* Yahoo! Mail Override */ .footerContent a .yshortcuts, .footerContent a span /* Yahoo! Mail Override */{
                color: #606060;
                font-weight: normal;
                text-decoration: underline;
            }

            /* /\/\/\/\/\/\/\/\/ MOBILE STYLES /\/\/\/\/\/\/\/\/ */

            @media only screen and (max-width: 480px){
                /* /\/\/\/\/\/\/ CLIENT-SPECIFIC MOBILE STYLES /\/\/\/\/\/\/ */
                body, table, td, p, a, li, blockquote{-webkit-text-size-adjust: none !important;} /* Prevent Webkit platforms from changing default text sizes */
                body{width: 100% !important; min-width: 100% !important;} /* Prevent iOS Mail from adding padding to the body */

                /* /\/\/\/\/\/\/ MOBILE RESET STYLES /\/\/\/\/\/\/ */
                #bodyCell{padding: 10px !important;}

                /* /\/\/\/\/\/\/ MOBILE TEMPLATE STYLES /\/\/\/\/\/\/ */

                /* ======== Page Styles ======== */

                /**
                * @tip Make the template fluid for portrait or landscape view adaptability. If a fluid layout doesn't work for you, set the width to 300px instead.
                */
                #templateContainer{
                    max-width: 600px !important;
                    width: 100% !important;
                }

                /**
                * @tip Make the first-level headings larger in size for better readability on small screens.
                */
                h1{
                    font-size: 24px !important;
                    line-height: 100% !important;
                }

                /**
                * @tip Make the second-level headings larger in size for better readability on small screens.
                */
                h2{
                    font-size: 20px !important;
                    line-height: 100% !important;
                }

                /**
                * @tip Make the third-level headings larger in size for better readability on small screens.
                */
                h3{
                    font-size: 18px !important;
                    line-height: 100% !important;
                }

                /**
                * @tip Make the fourth-level headings larger in size for better readability on small screens.
                */
                h4{
                    font-size: 16px !important;
                    line-height: 100% !important;
                }

                /* ======== Header Styles ======== */

                #templatePreheader{display: none !important;} /* Hide the template preheader to save space */

                /**
                * @tip Make the main header image fluid for portrait or landscape view adaptability, and set the image's original width as the max-width. If a fluid setting doesn't work, set the image width to half its original size instead.
                */
                #headerImage{
                    height: auto !important;
                    max-width: 600px !important;
                    width: 100% !important;
                }

                /**
                * @tip Make the header content text larger in size for better readability on small screens. We recommend a font size of at least 16px.
                */
                .headerContent{
                    font-size: 20px !important;
                    line-height: 125% !important;
                }

                /* ======== Body Styles ======== */

                /**
                * @tip Make the body content text larger in size for better readability on small screens. We recommend a font size of at least 16px.
                */
                .bodyContent{
                    font-size: 18px !important;
                    line-height: 125% !important;
                }

                .templateDataTableContainer {
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<div xmlns="http://www.w3.org/1999/xhtml" xmlns:xn="http://www.xmlnews.org/ns/" class="xn-newslines">

<h1 class="xn-hedline">Canon to Deliver World's First Nanoimprint Replica Mask Manufacturing Equipment for Mass-Production to Leading Mask Supplier</h1>

<p class="xn-distributor">PR Newswire</p>

<p class="xn-dateline">MELVILLE, N.Y., Feb. 27, 2017</p>
</div>

<div class="xn-content" xmlns="http://www.w3.org/1999/xhtml" xmlns:xn="http://www.xmlnews.org/ns/">

<p>
<span class="xn-location">MELVILLE, N.Y.</span>, <span class="xn-chron">Feb. 27, 2017</span> /PRNewswire/ --&nbsp;Canon <span class="xn-location">U.S.A.</span>, Inc., a leader of digital imaging solutions, has announced that its parent company, Canon Inc., will commence sales of the FPA-1100NR2, the world's first mass-production replica mask manufacturing equipment. The FPA-1100NR2 duplicates masks for semiconductor lithography equipment utilizing low-cost nanoimprint technology. Canon Inc. has announced that FPA-1100NR2 equipment will be sold to Dai Nippon Printing Co., Ltd, a leading supplier of masks for nanoimprinting.</p>

   

<p>Facing the difficult challenge of circuit scaling or miniaturization, the key to the advancement of semiconductor devices, nanoimprint lithography (NIL) has garnered a lot of attention as a new technology that achieves even more detailed circuit patterns of 10nm (1 nanometer = 1 billionth of a meter) at an even lower cost, compared with photolithography.<sup>1</sup> Since 2004, Canon has been carrying out R&amp;D in the field of semiconductor manufacturing equipment that utilizes nanoimprint technology.</p>

<p>When mass producing semiconductor devices with nanoimprint lithography, it is important to control the cost of the replica masks that are required for the patterning of advanced semiconductor devices. This can be challenging due to the expensive, time-consuming step of using electron beam writers to define patterns on a mask. To address this problem, Canon has developed mask replication technology that enables the fabrication of replica masks at a low cost.</p>

<p>Employing nanoimprint technology, the FPA-1100NR2 can faithfully transcribe a pattern from an expensive master mask to a replica mask blank in a short amount of time, making possible replica mask production with high efficiency. Through this process, mask productivity can be rapidly increased at the production sites of nanoimprint mask suppliers, to greatly reduce the manufacturing costs of semiconductor devices produced using nanoimprint technology and realize a cutting-edge lithography process with a reduced cost of ownership.<sup>2</sup>
</p>

<p>Canon will host several presentations on its nanoimprint technology and will report on the progress of NIL development at SPIE Advanced Lithography 2017, to be held from <span class="xn-chron">February 26 to March 2, 2017</span>, in <span class="xn-location">San Jose, California</span>, U.S.A.</p>

<p>For more information about Canon <span class="xn-location">U.S.A.'s</span> industrial products, please visit <a href="https://www.usa.canon.com/industrial" rel="nofollow" target="_blank"><b>https://www.usa.canon.com/industrial</b></a>. </p>

<p>
<b>About Nanoimprint Technology</b>
</p>

<p>Nanoimprint lithography manufacturing equipment utilizes a patterning technology that physically presses a mask, into which circuit patterns have been cut, onto a resin wafer resist to faithfully reproduce patterns with a higher resolution and greater uniformity compared to those produced by photolithography equipment. Additionally, as this technology does not require an array of wide-diameter lenses and the expensive light sources necessary for advanced photolithography equipment, NIL equipment achieves a simpler, more compact design, allowing for multiple units to be clustered together for increased productivity.</p>

<p>
<b>About Canon <span class="xn-location">U.S.A.</span>, Inc. </b>
</p>

<p>Canon <span class="xn-location">U.S.A.</span>, Inc., is a leading provider of consumer, business-to-business, and industrial digital imaging solutions to <span class="xn-location">the United States</span> and to <span class="xn-location">Latin America</span> and the <span class="xn-location">Caribbean</span> markets. With approximately <span class="xn-money">$29 billion</span> in global revenue, its parent company, Canon Inc. (NYSE:CAJ), ranks third overall in U.S. patents granted in 2016.<sup>&dagger;</sup> Canon <span class="xn-location">U.S.A.</span> is committed to the highest level of customer satisfaction and loyalty, providing 100 percent U.S.-based consumer service and support for all of the products it distributes in <span class="xn-location">the United States</span>. Canon <span class="xn-location">U.S.A.</span> is dedicated to its <i>Kyosei</i> philosophy of social and environmental responsibility. In 2014, the Canon Americas Headquarters secured LEED&reg; Gold certification, a recognition for the design, construction, operations and maintenance of high-performance green buildings. To keep apprised of the latest news from Canon <span class="xn-location">U.S.A.</span>, sign up for the Company's RSS news feed by visiting http://www.usa.canon.com/rss&nbsp;and follow us on Twitter @CanonUSA. For media inquiries, please contact <a href="mailto:pr@cusa.canon.com" rel="nofollow" target="_blank"><b>pr@cusa.canon.com</b></a>.</p>

<p>
<sup>&dagger;</sup>Based on weekly patent counts issued by United States Patent and Trademark Office.</p>

<p>
<sup>1</sup> A semiconductor lithography system that utilizes wide-diameter lenses and a laser light source to transcribe circuit patterns onto wafers.</p>

<p>
<sup>2</sup> Necessary equipment investments and operating costs related to semiconductor production. Used as one of the benchmarks for assessing the productivity of processes and production equipment used in a semiconductor manufacturer's high-volume production line.</p>

<p>
<b>Canon <span class="xn-location">U.S.A.</span> Web site:</b>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; <br>
<a href="http://www.usa.canon.com/" rel="nofollow" target="_blank">http://www.usa.canon.com</a>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </p>

<p>
<b>For sales information/customer support:&nbsp; <br>
</b>1-800-OK-CANON<b>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</b>&nbsp; </p>

<p></p>

<p>
<b>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </b>
</p>

<div class="PRN_ImbeddedAssetReference" id="DivAssetPlaceHolder2">

</div>

<p>SOURCE  Canon <span class="xn-location">U.S.A.</span>, Inc.</p>

</div>

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<p>CONTACT: Andrew Berger, Canon U.S.A., Inc., 631.330.2403, aberger@cusa.canon.com <br>
</p>

<p>Web Site: <a class="release-link" href="http://www.usa.canon.com" target="_newbrowser">http://www.usa.canon.com</a>
<br>
</p>

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